Tech Support: (650) 273-2113

  Hexamethyldisilazane, 500ml #015-5751
Hexamethyldisilazane, 500ml
Chemical Name:
CAS Number:
Chemical Formula:
HMDS, Bis(Trimethylsilyl)Amine

Detailed Product Description:

A colorless, flammable liquid with an ammonia-like odor.  Soluble

in acetone, benzene, ethyl ether, heptane, perchloroethylene.  Reactive

with methanol and with water.


Grade & Purity:

Semiconductor (CMOS) Grade, Reagent, minimum 99.9% purity


Application Notes:

Most commonly used as a primer coating on silicon wafers prior to

application of photoresists.   This so-called “primer” actually acts as

a silylation blocking agent to protect the substrate during reactions.



Extremely flammable.  Dangerous fire risk.  Explosion limits in air

range from 0.8% to 16.3% with a flash point of 52˚F.


                Click here to download MSDS (Material Safety Data Sheet)


Though not considered a serious toxic hazard, ammonia compounds

may be formed through hydrolyzation in the digestive system in the

event of ingestion.   Excessive inhalation of vapors can irritate the

respiratory tract and lead to an accumulation of fluid in the lungs.

Eye irritant.  Direct contact with the eyes may cause severe burns.



Comes packed in 500ml boston round, amber glass bottle.  Also

available in 250ml size.

  Related products
Ethyl Silicate, 250ml
Ethyl Silicate, 250ml
See details

Price Each: $48.95
    Ethyl Silicate, 500ml
Ethyl Silicate, 500ml
See details

Price Each: $93.13
Hexamethyldisilazane, 250ml
Hexamethyldisilazane, 250ml
See details

Price Each: $43.95